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֪Ӱ Ұ˽𡸲Ʒ̳ǁ ҿꁶƷҰֻȥһط׼еýеѧ ΪطǸƷĵؽȱͺ ˇӣ

Ʒ̳طϻشȥһꁶȥܺͻ©Ұζŵ ҹ꽲ŵҪȥŻƷζ 

Ʒ̳ǵƷǼ

Ʒ̳ طͷһĻС էȥЩšƷĵؽֻǿܻߵȲҶڼûʲرر ſòȷʵ طرЩĻζ 

ҹϸҹǽա Ʒ̳Ұ˼ǸĵطվɸлĴӪ ָ݁ĪĹͬ꽲ǡζ 

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һꁶһȥ͵ һΧ Ʒ̳ÿһŵرİеϲеǸ òװʵҪꡰϷ 

͵͵꽲طһšݲͼǽ ͼϻǸƷϸñȡ衱в衱ɶϸᷢԭƷôི öЩζ͸ 
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ڶҲѧ һȥֱʡʲرú ʹ ʵʲرµIJҶƼԼϲ ΪطIJҶµÿЩͷŵĺò 

ƷͬʱǵøԱߵʽ Ʒ̳طпϲҲ˶ԸIJ 􁶻Ὺһ䡰ʲر ؾȻ 

Ʒ̳ζ

ζطƷһڵ Ǹ˹һӰ ϸϸƷζ˽֡֡СڲƷ̳ͷֳ ǽлҲǽ 

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ʳ갵ȥ浴ȻеƷ̳˸λϲڽ䶺ŲǽāʲرЩҳ ָǸץ꽲ǁ 

꽲飺ȥƷ̳Ҫʱ ź˽ʲرǷ Ϊطꡰ ߵǾǰһ 

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ܻطၶ̫ߵȿ ҹ꽲Ҷйһú ʵځ뻨̫ͨҲҰú ҪҪѧζ 

лͽȥƷ̳Ʒٹҷǣ


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ȫݶҵгģIJ߶װЧ͵Ƶҵνƽۺ󲻹ܡΪҵҪ ҵʿձΪҪӻϽЩҪز֡ҵЭͬƶҵ׼ǿҵƷαջʵߵȨ 

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ڶ촬ǸͶܼ͵Ĺҵ˵Ƚ 촬Ļеˮƽˮ඼ǵСڵIJ˵ֹʲ ԽϡӡԴЩҵ˵ԼʶйͶDzɱȵ ǵͶƼڽҵԼ촬ȴ豸ŹҵṹҵڵͶʵ촬ҵ 

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8.3.1 Ĥ豸PECVD/LPCVDг

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