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Դҵ ߣ 

 ֪ӰҰ˽𡸲Ʒ̳ ǁҿ ꁶƷҰ ֻ ȥһط ׼еýеѧΪ ط ǸƷĵؽ  ȱ ͺ ˇӣ

Ʒ̳ط ϻشȥһ   ꁶȥܺ ͻ©Ұζŵ ҹ꽲 ŵҪȥ ŻƷζ

Ʒ̳ ǵƷǼ

Ʒ̳ طͷһĻСէȥ ЩšƷĵؽ ֻǿ ܻߵȲҶ ڼ ûʲرر ſò ȷʵطر ЩĻ ζ

ҹϸҹ  ǽաƷ̳ Ұ˼ Ǹĵط վɸлĴӪָ݁ĪĹ ͬ꽲ǡζ

ȥ ⼸

һ ꁶһȥ͵ һΧƷ̳ÿһ ŵرİ еϲ еǸòװ ʵҪꡰϷ

͵͵꽲 طһšݲͼ ǽͼϻǸƷϸ ñȡ衱в衱ɶ ϸ ᷢԭƷôིöЩ ζ͸
ͼƬ

ڶ Ҳѧһȥ ֱʡʲرú ʹʵʲرµIJҶ ƼԼϲΪطIJҶµÿ Щͷŵĺò

 Ʒͬʱ ǵøԱߵʽƷ̳ ط пϲ Ҳ ˶ԸIJ􁶻Ὺ һ䡰ʲرؾȻ

Ʒ̳ζ 

ζ  طƷһڵǸ˹һӰϸϸƷζ ˽֡ ֡С ڲƷ̳ͷֳǽ лҲǽ

ͼƬ

ʳ갵 ȥ浴 ȻеƷ̳ ˸ λϲڽ䶺Ų ǽāʲر Щҳָ Ǹץ 꽲ǁ

꽲飺ȥƷ̳ Ҫʱ ź ˽ʲر ǷΪط ꡰߵ Ǿǰһ

ͼƬ

  ܻ طၶ̫ߵȿҹ꽲 Ҷй һúʵځ뻨̫ ͨ ҲҰúҪҪѧζ

 лͽ ȥƷ̳Ʒ ٹҷǣ


ǩƷ̳ƷĻ

Сkbˡ

ȫݶҵгģIJ ߶װЧ͵ Ƶҵ νƽۺ󲻹ܡ ΪҵҪҵʿձΪ ҪӻϽЩ Ҫز֡ҵЭͬ ƶҵ׼ ǿҵƷ αջ ʵߵȨ

һƷ¥̳

ڶ 촬ǸͶܼ͵Ĺҵ ˵Ƚ촬Ļеˮƽˮ ඼ǵСڵIJ ˵ ֹʲ ԽϡӡԴ Щҵ˵Լʶ йͶDzɱȵ ǵͶƼڽҵԼ촬ȴ豸 Źҵṹ ҵڵͶʵ촬ҵ

Ϸʯ·С

8.3.1 Ĥ豸PECVD/LPCVDг

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